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  4. Experimental and numerical investigations of microelectroplated sensors
 
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2000
Conference Paper
Title

Experimental and numerical investigations of microelectroplated sensors

Author(s)
Vogel, J.
Sommer, J.-P.
Noack, E.
Kieselstein, E.
Auerswald, E.
Gentzsch, S.
Großer, V.
Winkler, T.
Michel, B.
Mainwork
MicroMat 2000. Proceedings 3rd International Conference and Exhibition Micro Materials  
Conference
Micro Materials (Micro Mat) 2000  
Language
English
Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM  
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