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  4. Deformation behavior of micro mirror arrays under optical power
 
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2000
Conference Paper
Title

Deformation behavior of micro mirror arrays under optical power

Author(s)
Kurth, S.
Kehr, K.
Kaufmann, C.
Faust, W.
Dötzel, W.
Michel, B.
Mainwork
MicroMat 2000. Proceedings 3rd International Conference and Exhibition Micro Materials  
Conference
Micro Materials (Micro Mat) 2000  
Language
English
Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM  
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