English
Deutsch
Log In
Password Login
or
Log in with Fraunhofer Smartcard
Research Outputs
Projects
Researchers
Institutes
Statistics
Fraunhofer-Gesellschaft
Home
Fraunhofer-Gesellschaft
Konferenzschrift
Advances in silicon to glass bonding with laser
Details
Full
Export
Statistics
Options
2001
Conference Paper
Titel
Advances in silicon to glass bonding with laser
Author(s)
Wild, M.J.
Gillner, A.
Poprawe, R.
Fraunhofer-Institut für Lasertechnik ILT
Hauptwerk
MEMS design, fabrication, characterization, and packaging
Konferenz
Conference "MEMS Design, Fabrication, Characterization, and Packaging" 2001
DOI
10.1117/12.425293
Language
English
google-scholar
View Details
Fraunhofer-Institut für Lasertechnik ILT