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Pneumatic silicon microvalves with piezoelectric actuation
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2001
Conference Paper
Titel
Pneumatic silicon microvalves with piezoelectric actuation
Author(s)
Kluge, S.
Neumayer, G.
Schaber, U.
Wackerle, M.
Maichl, M.
Post, P.
Weinmann, M.
Wanner, R.
Hauptwerk
Transducers '01 / Eurosensors XV. Digest of technical papers
Konferenz
International Conference on Solid-State Sensors and Actuators 2001
Eurosensors 2001
Language
English
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Fraunhofer-Institut für Mikroelektronische Schaltungen und Systeme IMS