English
Deutsch
Log In
Password Login
or
Log in with Fraunhofer Smartcard
Research Outputs
Projects
Researchers
Institutes
Statistics
Fraunhofer-Gesellschaft
Home
Fraunhofer-Gesellschaft
Artikel
Influence of barrier and cap layer deposition on the properties of capped and non-capped porous silicon oxide
Details
Full
Export
Statistics
Options
2001
Journal Article
Titel
Influence of barrier and cap layer deposition on the properties of capped and non-capped porous silicon oxide
Author(s)
Schulz, S.E.
Koerner, H.
Murray, C.
Streiter, I.
Gessner, T.
Zeitschrift
Microelectronic engineering
DOI
10.1016/S0167-9317(00)00427-5
Language
English
google-scholar
View Details
Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM