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Reliability of ultra-thin N2O-nitrided oxides grown by RTP under low pressure and in different gas atmospheres

 
: Beichele, M.; Bauer, A.J.; Ryssel, H.

:

Microelectronics reliability 40 (2000), No.4-5, pp.723-726
ISSN: 0026-2714
English
Journal Article
Fraunhofer IIS B ( IISB) ()

: http://publica.fraunhofer.de/documents/B-72439.html