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New plasma activation processes during the high-rate electron beam evaporation for large area coating
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2001
Conference Paper
Title
New plasma activation processes during the high-rate electron beam evaporation for large area coating
Author(s)
Scheffel, B.
Metzner, C.
Goedicke, K.
Kirchhoff, V.
Mainwork
6th International Symposium on Sputtering & Plasma Processes 2001. Proceedings
Conference
International Symposium on Sputtering & Plasma Processes (ISSP) 2001
Language
English
Fraunhofer-Institut für Organische Elektronik, Elektronenstrahl- und Plasmatechnik FEP
