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New plasma activation processes during the high-rate electron beam evaporation for large area coating

 
: Scheffel, B.; Metzner, C.; Goedicke, K.; Kirchhoff, V.

Kusano, E. ; Japan Technology Transfer Association, Study Committee of Sputtering & Plasma Processes:
6th International Symposium on Sputtering & Plasma Processes 2001. Proceedings
Kanazawa, 2001
pp.248
International Symposium on Sputtering & Plasma Processes (ISSP) <6, 2001, Kanazawa>
English
Conference Paper
Fraunhofer FEP ()

: http://publica.fraunhofer.de/documents/B-71482.html