Publica
Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten. New plasma activation processes during the high-rate electron beam evaporation for large area coating
| Kusano, E. ; Japan Technology Transfer Association, Study Committee of Sputtering & Plasma Processes:
6th International Symposium on Sputtering & Plasma Processes 2001. Proceedings
Kanazawa, 2001
pp.248 |
| International Symposium on Sputtering & Plasma Processes (ISSP) <6, 2001, Kanazawa> |
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| English |
| Conference Paper |
| Fraunhofer FEP () |