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  4. Deposition of multilayer optical coatings onto plastic webs by pulse magnetron sputtering
 
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2001
Conference Paper
Title

Deposition of multilayer optical coatings onto plastic webs by pulse magnetron sputtering

Title Supplement
Challenges and opportunities
Author(s)
Rank, R.
Fahland, M.
Kirchhoff, V.
Charton, C.
Stöhr, U.
Mainwork
6th International Symposium on Sputtering & Plasma Processes 2001. Proceedings  
Conference
International Symposium on Sputtering & Plasma Processes (ISSP) 2001  
Language
English
Fraunhofer-Institut für Organische Elektronik, Elektronenstrahl- und Plasmatechnik FEP  
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