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Deposition of multilayer optical coatings onto plastic webs by pulse magnetron sputtering

Challenges and opportunities
 
: Rank, R.; Fahland, M.; Kirchhoff, V.; Charton, C.; Stöhr, U.

Kusano, E. ; Japan Technology Transfer Association, Study Committee of Sputtering & Plasma Processes:
6th International Symposium on Sputtering & Plasma Processes 2001. Proceedings
Kanazawa, 2001
pp.189-192
International Symposium on Sputtering & Plasma Processes (ISSP) <6, 2001, Kanazawa>
English
Conference Paper
Fraunhofer FEP ()

: http://publica.fraunhofer.de/documents/B-71470.html