Adhesion problems during handling of micro parts - vibration assisted release of objects

The correct assembly of micro systems can become impossible when adhesion appears between a micro part and the gripper. In this case the micro part will stick to the gripper, thus disturbing an automatic assembly process. Important reasons for this undesirable adhesion are electrostatic forces, intermolecular forces (e. g. von-der-Waals), liquid bridge forces, and mechanical clamping. This paper reports on the effects of these forces on the handling of micro parts, and on strategies to avoid or overcome adhesion forces.