Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.

Anode effects on energetic particle bombardment of the substrate in pulsed magnetron sputtering

 
: Bartzsch, H.; Frach, P.; Goedicke, K.

:

Surface and coatings technology 132 (2000), No.2-3, pp.244-250
ISSN: 0257-8972
International Conference on Plasma Surface Engineering <7, 2000, Garmisch-Partenkirchen>
English
Conference Paper
Fraunhofer FEP ()

: http://publica.fraunhofer.de/documents/B-67407.html