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Requirements for the system power supply sputter source for high power pulsed magnetron sputtering

 
: Krause, U.; Schulze, M.; Fuchs, H.

Meinema, H.A.:
Advanced coatings on glass & plastics for large-area or high-volume products. Proceedings of the 3rd International Conference on Coatings on Glass 2000
Eindhoven: TNO/TPD, Division Materials Research & Technology, 2000
ISBN: 90-9014255-X
pp.173-180
International Conference on Coatings on Glass (ICCG) <3, 2000, Maastricht>
English
Conference Paper
Fraunhofer FEP ()

: http://publica.fraunhofer.de/documents/B-67405.html