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Low resistivity transparent electrodes for displays on polymer substrates

: Fahland, M.; Karlsson, P.; Charton, C.

Meinema, H.A.:
Advanced coatings on glass & plastics for large-area or high-volume products. Proceedings of the 3rd International Conference on Coatings on Glass 2000
Eindhoven: TNO/TPD, Division Materials Research & Technology, 2000
ISBN: 90-9014255-X
International Conference on Coatings on Glass (ICCG) <3, 2000, Maastricht>
Conference Paper
Fraunhofer FEP ()

One of the main difficulties for manufacturing displays on polymer substrates is the deposition of low resistivity Indium Tin Oxide (ITO). Most polymer materials do not withstand substrate temperatures above 200°C required for this process. This is the reason why a solution is proposed which includes the substitution of a single ITO layer by a three layer system consisting of ITO and silver. A sheet resistance below 16 omega/ at a transmittance over 80 % at 550 nm wavelength could be achieved. Additionally the overall Indium content in the coating is reduced. This will lead to a reduction of target costs during production.