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Influence of process parameters on the structure and the properties of ZrO2 coatings deposited by reactive pulsed magnetron sputtering (PMS)

: Goedicke, K.; Liebig, J.-S.; Zywitzki, O.; Sahm, H.


Thin solid films 377-378 (2000), pp.37-42
ISSN: 0040-6090
International Conference on Metallurgical Coatings and Thin Films <27, 2000, San Diego/Calif.>
Journal Article, Conference Paper
Fraunhofer FEP ()