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High C-doping of MOVPE grown thin Al(x)Ga(1-x)As layers for AlGaAs/GaAs interband tunneling devices

 
: Dimroth, F.; Schubert, U.; Bett, A.W.; Schienle, F.

Biefeld, R.M.:
Special issue on the Ninth Biennial Workshop on Organometallic Vapor Phase Epitaxy 1999
Warrendale/Pa.: TMS, 2000 (Journal of electronic materials 29.2000, 1)
pp.47-52
Workshop on Organometallic Vapor Phase Epitaxy <9, 1999, Ponte Vedra Beach/Fla.>
English
Conference Paper
Fraunhofer ISE ()
Epitaxie; Epitaxie MOVPE

: http://publica.fraunhofer.de/documents/B-65210.html