: Schiller, N.; Morgner, H.; Fahland, M.; Straach, S.; Räbisch, M.; Charton, C.

Abstract
Transparent oxide layers on plastic webs show a high potential for a variety of applications. The Pulsed Magnetron Sputter (PMS) process using Dual Magnetron Systems is the key to deposit oxide layers as TiO(2) and SiO(2) on plastic webs for optical applications like window films. Transparent permeation barrier layers for food packaging have already gained industrial application. The barrier properties are essentially influenced by the deposition technology. Plasma-activated evaporation may significantly improve the barrier properties. High end permeation barriers layers for applications in the display industry can be achieved by further increasing the energy of the condensing particles. Oxide hardcoats (SiO2, Al2O3) deposited on plastic webs by plasma-activated evaporation exhibit high wear resistance. Deposition rates up to 600 nm/s can be achieved with the Hollow cathode Activated Deposition (HAD) process.