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Comparison of lateral and vertical switches for application as microrelay
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1998
Conference Paper
Titel
Comparison of lateral and vertical switches for application as microrelay
Author(s)
Schiele, I.
Vogel, S.
Hillerich, B.
Kozlowski, F.
Hauptwerk
Ninth Micromechanics Europe Workshop, MME '98. Proceedings
Konferenz
Micromechanics Europe Workshop (MME) 1998
Language
English
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Fraunhofer-Institut für Mikroelektronische Schaltungen und Systeme IMS