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Comparison of lateral and vertical switches for application as microrelay

 
: Schiele, I.; Vogel, S.; Hillerich, B.; Kozlowski, F.

Ninth Micromechanics Europe Workshop, MME '98. Proceedings
Oslo: SINTEF, 1998
pp.171-174
Micromechanics Europe Workshop (MME) <9, 1998, Ulvik>
English
Conference Paper
Fraunhofer IMS ()

: http://publica.fraunhofer.de/documents/B-64615.html