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Development and characterization of a CVD system for thin film solar cell manufacturing

 
: Faller, F.R.; Hurrle, A.; Schillinger, N.

Öztürk, M.C. ; Materials Research Society -MRS-:
Rapid thermal and integrated processing VII
Pittsburgh, Pa.: MRS, 1998 (Materials Research Society symposia proceedings 525)
ISBN: 1-558-99431-9
pp.63-70
Symposium Rapid Thermal and Integrated Processing <7, 1998, San Francisco/Calif.>
English
Conference Paper
Fraunhofer ISE ()

: http://publica.fraunhofer.de/documents/B-64427.html