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Cross-sectional specimen preparation from ICs downside for SEM and TEM-failure analysis using focused ion beam etching
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1999
Journal Article
Titel
Cross-sectional specimen preparation from ICs downside for SEM and TEM-failure analysis using focused ion beam etching
Author(s)
Altmann, F.
Katzer, D.
Zeitschrift
Thin solid films
DOI
10.1016/S0040-6090(98)01683-6
Language
English
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Fraunhofer-Institut für Werkstoffmechanik IWM