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Vibration measurement of microstructures by means of laseroptical modalanalysis

 
: Schnitzer, R.; Rümmler, N.; Großer, V.; Michel, B.

Gorecki, C. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.; European Optical Society -EOS-:
Microsystems metrology and inspection
Bellingham/Wash.: SPIE, 1999 (Europto series)
ISBN: 0-8194-3311-X
pp.72-79
Conference on Microsystems Metrology and Inspection <1999, München>
English
Conference Paper
Fraunhofer IZM ()

: http://publica.fraunhofer.de/documents/B-63042.html