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Infrared study of the Si surfaces and bonded Si wafers
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1999
Journal Article
Titel
Infrared study of the Si surfaces and bonded Si wafers
Author(s)
Milekhin, A.
Friedrich, M.
Wiemer, M.
Hiller, K.
Gessner, T.
Zahn, D.R.T.
Zeitschrift
Semiconductor Science and Technology
DOI
10.1088/0268-1242/14/1/009
Language
English
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Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM