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Analogously working micromirror arrays
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1999
Conference Paper
Titel
Analogously working micromirror arrays
Author(s)
Kehr, K.
Kurth, S.
Mehner, J.
Kaufmann, C.
Hahn, R.
Dötzel, W.
Gessner, T.
Hauptwerk
Miniaturized systems with micro-optics and MEMS
Konferenz
Conference on Miniaturized Systems with Micro-Optics and MEMS 1999
Language
English
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Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM