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  4. Investigation of heat transfer in micromirrors
 
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1999
Conference Paper
Title

Investigation of heat transfer in micromirrors

Author(s)
Kehr, K.
Kurth, S.
Mehner, J.
Dötzel, W.
Gessner, T.
Mainwork
Microsystems metrology and inspection  
Conference
Conference on Microsystems Metrology and Inspection 1999  
Language
English
Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM  
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