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Investigation of heat transfer in micromirrors
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1999
Conference Paper
Title
Investigation of heat transfer in micromirrors
Author(s)
Kehr, K.
Kurth, S.
Mehner, J.
Dötzel, W.
Gessner, T.
Mainwork
Microsystems metrology and inspection
Conference
Conference on Microsystems Metrology and Inspection 1999
Language
English
Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM