Publica
Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten. Investigation of heat transfer in micromirrors
| Gorecki, C. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.; European Optical Society -EOS-:
Microsystems metrology and inspection
Bellingham/Wash.: SPIE, 1999 (Europto series)
ISBN: 0-8194-3311-X
pp.24-35 |
| Conference on Microsystems Metrology and Inspection <1999, München> |
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| English |
| Conference Paper |
| Fraunhofer IZM () |