Publica
Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten. Fabrication of high frequency microscanners by using low temperature silicon wafer bonding
:
Hiller, K.; Wiemer, M.; Hahn, R.; Kaufmann, C.; Kurth, S.; Kehr, K.; Gessner, T.; Dötzel, W.; Milekhin, A.; Friedrich, M.; Zahn, D. | Okuyama, M.; Mitsuhasi, W.; Yamashita, K.:
Transducers '99, 10th International Conference on Solid-State Sensors and Actuators. Digest of technical papers
Tokyo: Institute of Electrical Engineers of Japan, 1999
pp.1448-1451 (Vol.2) |
| International Conference on Solid-State Sensors and Actuators <10, 1999, Sendai> |
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| English |
| Conference Paper |
| Fraunhofer IZM () |