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Fabrication of high frequency microscanners by using low temperature silicon wafer bonding

 

Okuyama, M.; Mitsuhasi, W.; Yamashita, K.:
Transducers '99, 10th International Conference on Solid-State Sensors and Actuators. Digest of technical papers
Tokyo: Institute of Electrical Engineers of Japan, 1999
pp.1448-1451 (Vol.2)
International Conference on Solid-State Sensors and Actuators <10, 1999, Sendai>
English
Conference Paper
Fraunhofer IZM ()

: http://publica.fraunhofer.de/documents/B-62999.html