1999
Conference Paper
Title

Fabrication of high frequency microscanners by using low temperature silicon wafer bonding

Author(s)
Hiller, K.
Wiemer, M.
Hahn, R.
Kaufmann, C.
Kurth, S.
Kehr, K.
Gessner, T.
Dötzel, W.
Milekhin, A.
Friedrich, M.
Zahn, D.
Mainwork
Conference
Language
English