1999
Conference Paper
Title

Low-temperature approaches for fabrication of high-frequency microscanners

Author(s)
Hiller, K.
Hahn, R.
Kaufmann, C.
Kurth, S.
Kehr, K.
Gessner, T.
Dötzel, W.
Wiemer, M.
Schubert, I.
Mainwork
Conference
Language
English