Publica
Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten. Low-temperature approaches for fabrication of high-frequency microscanners
| Motamedi, M.E.; Goering, R. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
Miniaturized systems with micro-optics and MEMS
Bellingham, Wash.: SPIE, 1999 (Proceedings of SPIE 3878)
ISBN: 0-8194-3475-2
pp.58-67 |
| Conference on Miniaturized Systems with Micro-Optics and MEMS <1999, Santa Clara/Calif.> |
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| English |
| Conference Paper |
| Fraunhofer IZM () |