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Low-temperature approaches for fabrication of high-frequency microscanners

 

Motamedi, M.E.; Goering, R. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
Miniaturized systems with micro-optics and MEMS
Bellingham, Wash.: SPIE, 1999 (SPIE Proceedings Series 3878)
ISBN: 0-8194-3475-2
pp.58-67
Conference on Miniaturized Systems with Micro-Optics and MEMS <1999, Santa Clara/Calif.>
English
Conference Paper
Fraunhofer IZM ()

: http://publica.fraunhofer.de/documents/B-62998.html