Publica
Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten. Simulation of a coating protection for an In Situ Ellipsometer in a CVD Furnace
| Maes, H.E.:
29th European Solid-State Device Research Conference 1999. Proceedings
Paris: Ed. Frontieres, 1999
ISBN: 2-86332-245-1 |
| European Solid-State Device Research Conference (ESSDERC) <29, 1999, Leuven> |
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| English |
| Conference Paper |
| Fraunhofer IIS B ( IISB) () |