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Simulation of a coating protection for an In Situ Ellipsometer in a CVD Furnace
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1999
Conference Paper
Title
Simulation of a coating protection for an In Situ Ellipsometer in a CVD Furnace
Author(s)
Poscher, S.
Lehnert, W.
Ryssel, H.
Mainwork
29th European Solid-State Device Research Conference 1999. Proceedings
Conference
European Solid-State Device Research Conference (ESSDERC) 1999
Language
English
IIS-B
