English
Deutsch
Log In
Password Login
or
Log in with Fraunhofer Smartcard
Research Outputs
Projects
Researchers
Institutes
Statistics
Fraunhofer-Gesellschaft
Home
Fraunhofer-Gesellschaft
Konferenzschrift
Simulation of a coating protection for an In Situ Ellipsometer in a CVD Furnace
Details
Full
Export
Statistics
Options
1999
Conference Paper
Titel
Simulation of a coating protection for an In Situ Ellipsometer in a CVD Furnace
Author(s)
Poscher, S.
Lehnert, W.
Ryssel, H.
Hauptwerk
29th European Solid-State Device Research Conference 1999. Proceedings
Konferenz
European Solid-State Device Research Conference (ESSDERC) 1999
Language
English
google-scholar
View Details
IIS-B