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Material removal and chemical and structural changes induced by irradiation of polymer surfaces with KrF-excimer laser radiation



Fresenius Journal of Analytical Chemistry 365 (1999), pp.183-187 : Ill., Lit.
ISSN: 0937-0633
Journal Article
Fraunhofer ILT ()
excimer laser

Holes in polypropylene (PP) and polymethylmethacrylate (PMMA) plates, 0.5 mm in thickness were drilled by irradiation with up to 3000 pulses of KrF-excimer laser radiation at fluences per pulse in the range 0.1-10 J/cm2, conditions which yield a laser-induces plasma/vapor plume. The process was analyzed experimentally in terms of material removal rate, optical emission of the laser-induced plasma, hole geometry, debris production at the hole edge, and chemical changes in the polymer induced by the laser irradiation. Additionally the process was simulated using a model based on degradation of the polymer induced by optical absorption and heating, leading to gas-phase products. Such characteristics as the material removal rate as a function of fluence, the nature of the gas phase products and the deposition of debris were calculated.