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Extending speckle pattern interferometry for use on a microscopic scale

Speckleinterferometrie für das Messen im mikroskopischen Bereich

: Aswendt, P.; Höfling, R.; Hiller, K.; Wiemer, M.

	Dötzel, W.: 4. Chemnitzer Fachtagung Mikromechanik & Mikroelektronik. Mikrosystemtechnik : 11./12. Oktober 1999 Chemnitz: TU, 1999 ISBN: 3-00-004902-9 pp.164-170
	Chemnitzer Fachtagung Mikromechanik und Mikroelektronik <4, 1999, Chemnitz> Fachtagung Mikrosystemtechnik <4, 1999, Chemnitz>

	English
	Conference Paper
	Fraunhofer IWU ()
	speckle interferometry; vibration; deformation; microscopy; microsensors; MEMS testing

Abstract
Design, manufacturing and test of microcomponents generate new challenges for measurement techniques in general. The non-contacting operation of optical metrology makes it attractive to solve the task of measuring geometric quantities of microparts. So far, speckle pattern interferometry (ESPI) is well established as a measuring tool for analyzing deformation, vibration and strain on a macroscopic level. This paper deals with possibilities and application limits of ESPI in the case of scaling down the object size below one millimeter. Theoretical considerations are shown together with experimental verification.

: http://publica.fraunhofer.de/documents/B-44758.html