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  4. Extending speckle pattern interferometry for use on a microscopic scale
 
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1999
Conference Paper
Title

Extending speckle pattern interferometry for use on a microscopic scale

Other Title
Speckleinterferometrie für das Messen im mikroskopischen Bereich
Abstract
Design, manufacturing and test of microcomponents generate new challenges for measurement techniques in general. The non-contacting operation of optical metrology makes it attractive to solve the task of measuring geometric quantities of microparts. So far, speckle pattern interferometry (ESPI) is well established as a measuring tool for analyzing deformation, vibration and strain on a macroscopic level. This paper deals with possibilities and application limits of ESPI in the case of scaling down the object size below one millimeter. Theoretical considerations are shown together with experimental verification.
Author(s)
Aswendt, P.
Höfling, R.
Hiller, K.
Wiemer, M.
Mainwork
4. Chemnitzer Fachtagung Mikromechanik & Mikroelektronik. Mikrosystemtechnik  
Conference
Chemnitzer Fachtagung Mikromechanik und Mikroelektronik 1999  
Fachtagung Mikrosystemtechnik 1999  
Language
English
Fraunhofer-Institut für Werkzeugmaschinen und Umformtechnik IWU  
Keyword(s)
  • speckle interferometry

  • vibration

  • deformation

  • microscopy

  • microsensors

  • MEMS testing

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