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Tunable Fabry-Perot interferometer for 3 - 4.5 mu m wavelength with bulk micromachined reflector carrier

: Kurth, S.; Hiller, K.; Neumann, N.; Heinze, M.; Dötzel, W.; Gessner, T.


Smith, J.H. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
MOEMS and miniaturized systems III : SPIE Conference on MOEMS and Miniaturized Systems, 27-29 January 2003, San Jose, USA. Proceedings
Bellingham, Wash.: SPIE, 2003 (SPIE Proceedings Series 4983)
ISBN: 0-8194-4783-8
Conference on MOEMS and Miniaturized Systems <3, 2003, San Jose/Calif.>
Conference Paper
Fraunhofer IZM ()
Fraunhofer ENAS ()

This contribution deals with design, fabrication and test of a micromachined first order Fabry-Perot interferometer (FPI) usable as tunable infrared filter in a spectrometer. The approach discussed here minimizes mirror curvature by using relative thick (300 mu m Si ) mirror carriers for the fixed and the movable mirror of the FPI. We use thermally grown lambda /4 thick SiO/sub 2/ for antireflection layer at the mirror back side and for the first low refractive layer followed by a lambda /4 thick polycrystalline silicon high refractive layer. Second and third lambda /4 layer pairs of SiO/sub 2/ and polycrystalline silicon complete the mirrors. The cavity size is electrostatically tuned and capacitively detected by a closed loop control.