2003
Conference Paper
Title

Inorganic-organic hybrid polymers for information technology - from planar technology to 3-D nanostructures

Author(s)
Houbertz, R.
Fröhlich, L.
Schulz, J.
Popall, M.
Domann, G.
Streppel, U.
Dannberg, P.
Bräuer, A.
Serbin, J.
Chichkov, B.N.
Mainwork
Conference
Language
English