ORMOCER@s-inorganic-organic hybrid materials for integrated diffractive and refractive micro optics: Synthesis, processing and applications in optical components

Future info- and datacom applications will be based on optical and radio-frequency signal processing. Depending on the integration level and limitations within high frequency applications, data transfer technologies require integrated passive and active optical devices as key components as well as cost-efficient technologies for optical coupling. In order to fulfill technological needs, new optical materials with high thermal as well as mechanical stability and a very good compatibility to semiconductor device processing techniques have to be developed. Inorganic-organic hybrid polymers (ORMOCER(R)s) were systematically optimized towards low optical loss, high thermal stability and combined use as dielectric and waveguide layers in optical/radio-frequency devices. Besides, these materials can be easily replicated and thus are used for combined lithography/embossing technology. This paper will give a brief overview on material properties, micro technology and microoptical applications.