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Combination of metal oxyde based gas sensors with CMOS electronic circuits on wafer level

 
: Roetsch, P.; Böttner, H.; Seibert, K.; Götz, A.; Gracia, I.; Plaza, J.A.; Cane, C.

Reus, R. de:
Eurosensors XIV. Proceedings : The 14th European Conference on Solid-State Transducers. Copenhagen, Denmark, 27 - 30 August 2000
Lyngby: MIC, 2000
ISBN: 87-89935-50-0
pp.211-212
Eurosensors <14, 2000, Copenhagen>
European Conference on Solid-State Transducers <14, 2000, Copenhagen>
English
Conference Paper
Fraunhofer IPM ()

: http://publica.fraunhofer.de/documents/B-302008.html