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A novel micromachining technology for structuring borosilicate glass substrates

 
: Merz, P.; Quenzer, H.J.; Bernt, H.; Wagner, B.; Zoberbier, M.

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IEEE Electron Devices Society:
Transducers '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Vol.1 : Boston, June 8 - 12, 2003. Digest of technical papers
Piscataway: IEEE Operations Center, 2003
ISBN: 0-7803-7731-1
pp.258-261
International Conference on Solid State Sensors, Actuators and Microsystems <12, 2003, Boston/Mass.>
English
Conference Paper
Fraunhofer ISIT ()

: http://publica.fraunhofer.de/documents/B-301869.html