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Microcrack evaluation for electronics components by AFM nano-DAC deformation measurements

 
: Vogel, D.; Michel, B.

:

IEEE Robotics and Automation Society:
1st IEEE Conference on Nanotechnology 2001. Proceedings : October, 28 - 30, 2001, Maui, Hawaii. IEEE-NANO 2001
Piscataway, NJ: IEEE, 2001
ISBN: 0-7803-7215-8
pp.309-312
Conference on Nanotechnology (NANO) <1, 2001, Maui/Hawaii>
English
Conference Paper
Fraunhofer IZM ()

: http://publica.fraunhofer.de/documents/B-301160.html