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  4. InterChip via technology by using copper for vertical system integration
 
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2002
Conference Paper
Title

InterChip via technology by using copper for vertical system integration

Author(s)
Ramm, P.
Bonfert, D.
Ecke, R.
Iberl, F.
Klumpp, A.
Riedel, S.
Schulz, S.E.
Wieland, R.
Zacher, M.
Gessner, T.
Mainwork
Advanced Metallization Conference, AMC 2001  
Conference
Advanced Metallization Conference (AMC) 2001  
Language
English
Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM  
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