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InterChip via technology by using copper for vertical system integration
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2002
Conference Paper
Title
InterChip via technology by using copper for vertical system integration
Author(s)
Ramm, P.
Bonfert, D.
Ecke, R.
Iberl, F.
Klumpp, A.
Riedel, S.
Schulz, S.E.
Wieland, R.
Zacher, M.
Gessner, T.
Mainwork
Advanced Metallization Conference, AMC 2001
Conference
Advanced Metallization Conference (AMC) 2001
Language
English
Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM