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Micromaterials Center Berlin: Reliability research for MEMS

 
: Michel, B.; Winkler, T.

Meyendorf, N.; Baaklini, G.Y.; Michel, B. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
Nondestructive evaluation and reliability of micro- and nanomaterial systems : 18 - 19 March 2002, San Diego, USA
Bellingham/Wash.: SPIE, 2002 (SPIE Proceedings Series 4703)
ISBN: 0-8194-4451-0
pp.114-119
Conference "Nondestructive Evaluation and Reliability of Micro- and Nanomaterial Systems" <2002, Newport Beach/Calif.>
English
Conference Paper
Fraunhofer IZM ()

: http://publica.fraunhofer.de/documents/B-301149.html