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Micromachined pressure gauge for the vacuum range based on damping of a resonator
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2001
Conference Paper
Titel
Micromachined pressure gauge for the vacuum range based on damping of a resonator
Author(s)
Kurth, S.
Hiller, K.
Zichner, N.
Mehner, J.
Iwert, T.
Biehl, S.
Dötzel, W.
Gessner, T.
Hauptwerk
MEMS components and applications for industry, automobiles, aerospace, and communication
Konferenz
Conference "MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication" 2001
Language
English
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Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM