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MOEMS - Technology, packaging and optical interconnection

 
: Schröder, H.; Scheel, W.

Descour, M.R. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
Functional integration of opto-electro-mechanical devices and systems : 24 - 25 January 2001, San Jose, USA
Bellingham/Wash.: SPIE, 2001 (SPIE Proceedings Series 4284)
ISBN: 0-8194-3962-2
pp.122-131
Conference "Functional Integration of Opto-Electro-Mechanical Devices and Systems" <2001, San Jose/Calif.>
English
Conference Paper
Fraunhofer IZM ()

: http://publica.fraunhofer.de/documents/B-301084.html