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Simulation of thermal oxidation and diffusion processes by parallel PDE solver LiSS
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1996
Conference Paper
Titel
Simulation of thermal oxidation and diffusion processes by parallel PDE solver LiSS
Author(s)
Joppich, W.
Mijalkovic, S.
Hauptwerk
International Conference on Simulation of Semiconductor Processes and Devices. SISPAD '96
Konferenz
International Conference on Simulation of Semiconductor Processes and Devices (SISPAD) 1996
DOI
10.1109/SISPAD.1996.865286
Language
English
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Fraunhofer-Institut für Algorithmen und Wissenschaftliches Rechnen SCAI