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Derived boundary conditions for viscous thermal oxidation equations in pressure potential form
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1998
Conference Paper
Titel
Derived boundary conditions for viscous thermal oxidation equations in pressure potential form
Author(s)
Joppich, W.
Becker-Lengau, U.
Hackenberg, M.
Mijalkovic, S.
Hauptwerk
SISPAD 98. Simulation of semiconductor processes and devices
Konferenz
International Conference on Simulation of Semiconductor Processes and Devices (SISPAD) 1998
Language
English
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Fraunhofer-Institut für Algorithmen und Wissenschaftliches Rechnen SCAI