Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2012High rate deposition of mixed oxides by controlled reactive magnetron-sputtering from metallic targets
Bruns, S.; Vergöhl, M.; Werner, O.; Wallendorf, T.
Zeitschriftenaufsatz, Konferenzbeitrag
2010High rate deposition of mixed oxides by controlled reactive magnetron-sputtering from metallic targets
Bruns, S.; Vergöhl, M.; Werner, O.; Wallendorf, T.
Konferenzbeitrag
2008HIPIMS/HPPMS process design with multi channel pulse pattern controller
Wallendorf, T.; Vergöhl, M.; Werner, O.; Bandorf, R.
Konferenzbeitrag
2008Superimposed MF-HiPIMS processes for the deposition of ZrOO2R thin films
Vergöhl, M.; Werner, O.; Bruns, S.; Wallendorf, T.; Mark, G.
Konferenzbeitrag
2007Investigation of HPPMS titania thin films prepared by unipolar, DC-superimposed and bipolar sputtering
Bandorf, R.; Vergöhl, M.; Giesel, P.; Wallendorf, T.; Mark, G.
Konferenzbeitrag
2007Position and time resolved optical emission spectroscopy and film properties of ITO films deposited by high power pulsed magnetron sputtering
Sittinger, V.; Ruske, F.; Szyszka, B.; Christie, D.J.; Wallendorf, T.
Konferenzbeitrag
2006Investigation of reactively sputtered titania thin films prepared by DC, pulsed and highly ionized pulsed power magnetron sputtering
Bandorf, R.; Vergöhl, M.; Schiffmann, K.; Wallendorf, T.
Konferenzbeitrag
2006Sub microsecond resolved OES investigations in a pulsed magnetron discharge for amorphous carbon strain gauge thin film deposition
Wallendorf, T.; Marke, S.; Bandorf, R.
Konferenzbeitrag