Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2016Achromatic Talbot lithography with partially coherent extreme ultraviolet radiation
Brose, S.; Tempeler, J.; Danylyuk, S.; Loosen, P.; Juschkin, L.
Zeitschriftenaufsatz
2016Achromatic Talbot lithography with partially coherent extreme ultraviolet radiation: Process window analysis
Brose, S.; Tempeler, J.; Danylyuk, S.; Loosen, P.; Juschkin, L.
Zeitschriftenaufsatz
2016Enabling laboratory EUV research with a compact exposure tool
Brose, S.; Danylyuk, S.; Tempeler, J.; Kim, Hyun-su; Loosen, P.; Juschkin, L.
Konferenzbeitrag
2015Analysis of distinct scattering of extreme ultraviolet phase and amplitude multilayer defects with an actinic dark-field microscope
Bahrenberg, L.; Herbert, S.; Tempeler, J.; Maryasov, A.; Hofmann, O.; Danylyuk, S.; Lebert, R.; Loosen, P.; Juschkin, L.
Konferenzbeitrag
2015The voxel onset time as an in situ method to evaluate focal position effects on two-photon-induced lithography
Engelhardt, S.; Tempeler, J.; Wehner, M.
Zeitschriftenaufsatz
2013The voxel onset time as a method for the evaluation of two photon lithography
Engelhardt, S.; Tempeler, J.; Gillner, A.; Wehner, M.
Zeitschriftenaufsatz