Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2007Detection and review of crystal originated surface and sub surface defects on bare silicon
Nutsch, A.; Funakoshi, T.; Pfitzner, L.; Steffen, R.; Supplieth, F.; Ryssel, H.
Konferenzbeitrag
2006Importance of noise and crystal defects for matching of defect inspection tools at 50 nm defect size
Nutsch, A.; Supplieth, F.
Konferenzbeitrag
2005Reliable matching of 300 mm defect inspection tools @ sub 60 nm defect size
Nutsch, A.; Supplieth, F.; Pfitzner, L.; Ryssel, H.
Konferenzbeitrag