Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2020Nanostructured boron doped diamond electrodes with increased reactivity for solar-driven CO₂ reduction in room temperature ionic liquids
Knittel, Peter; Buchner, Franzsika; Hadzifekzovic, Emina; Giese, Christian; Quellmalz, Patricia; Seidel, Robert; Petit, Tristan; Iliev, Boyan; Schubert, Thomas J.S.; Nebel, Christoph E.; Foord, John S.
Zeitschriftenaufsatz
2017BEoL post CMP cleaning challenges for 22 nm FD-SOI and beyond
Koch, Johannes; Rehschuh, Stephan; Gerlich, Lukas; Dhavamani, Abitha; Steinke, Philipp; Krause, Robert; Naue, Johannes; Bott, Sascha; Vasilev, Boris; Breuer, Dirk; Seidel, Robert; Preusse, Axel; Bartha, Johann Wolfgang; Uhlig, Benjamin
Konferenzbeitrag
2017SARA - Subjective and objective data acquisition for physiotherapy treatment support
Bieber, Gerald; Seidel, Robert; Portwich, Rene
Konferenzbeitrag
2015Verification of E-Beam direct write integration into 28nm BEOL SRAM technology
Hohle, Christoph; Choi, Kang-Hoon; Gutsch, Manuela; Hanisch, Norbert; Seidel, Robert; Steidel, Katja; Thrun, Xaver; Werner, Thomas
Konferenzbeitrag
2014Integration of e-beam direct write in BEOL processes of 28nm SRAM technology node using mix and match
Gutsch, Manuela; Choi, Kang-Hoon; Hanisch, Norbert; Hohle, Christoph; Steidel, Katja; Thrun, Xaver; Seidel, Robert; Werner, Thomas
Konferenzbeitrag
2013Influence of high-energy electron irradiation on ultra-low-k characteristics and transistor performance
Steidel, Katja; Choi, Kang-Hoon; Freitag, Martin; Gutsch, Manuela; Hohle, Christoph; Seidel, Robert; Thrun, Xaver; Werner, Thomas
Konferenzbeitrag