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Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2014Properties of the c-Si/Al2O3 interface of ultrathin atomic layer deposited Al2O3 layers capped by SiNx for c-Si surface passivation
Schuldis, D.; Richter, A.; Benick, J.; Saint-Cast, P.; Hermle, M.; Glunz, S.W.
Zeitschriftenaufsatz
2012Influence of different post deposition treatments on the passivation quality and interface properties of thermal ALD Al2O3 capped by PECVD SiNx
Schuldis, D.; Richter, A.; Benick, J.; Hermle, M.
Konferenzbeitrag
2012Thermal stability of spatial ALD deposited Al2O3 capped by PECVD SiNx for the passivation of lowly- and highly-doped p-type silicon surfaces
Richter, A.; Souren, F.M.M.; Schuldis, D.; Görtzen, R.M.W.; Benick, J.; Hermle, M.; Glunz, S.W.
Konferenzbeitrag