Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2020Accuracy analysis of a stand-alone EUV spectrometer for the characterization of ultrathin films and nanoscale gratings
Schröder, Sophia; Bahrenberg, Lukas; Eryilmaz, Nimet Kutay; Glabisch, Sven; Danylyuk, Serhiy; Brose, Sascha; Stollenwerk, Jochen; Loosen, Peter
Konferenzbeitrag
2020Characterization of nanoscale gratings by spectroscopic reflectometry in the extreme ultraviolet with a stand-alone setup
Bahrenberg, Lukas; Danylyuk, Serhiy; Glabisch, Sven; Ghafoori, Moein; Schröder, Sophia; Brose, Sascha; Stollenwerk, Jochen; Loosen, Peter
Zeitschriftenaufsatz
2020Nanoscale grating characterization through EUV spectroscopy aided by machine learning techniques
Bahrenberg, Lukas; Glabisch, Sven; Danylyuk, Serhiy; Ghafoori, Moein; Schröder, Sophia; Brose, Sascha; Stollenwerk, Jochen; Loosen, Peter
Konferenzbeitrag