Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2021Gas Discharge Electron Sources - Powerful Tools for Thin-Film Technologies
Zimmermann, Burkhard; Mattausch, Gösta; Fietzke, Fred; Scheffel, Bert; Heinß, Jens-Peter; Top, Michiel; Metzner, Christoph
Zeitschriftenaufsatz
2021Plasma-assisted deposition of indium tin oxide thin films by sublimation using an anodic vacuum arc discharge
Scheffel, Bert; Zywitzki, Olaf; Preußner, Thomas; Kopte, Torsten
Zeitschriftenaufsatz
2021Synthesis of porous silicon, nickel and carbon layers by vapor phase dealloying
Saager, Stefan; Scheffel, Bert; Modes, Thomas; Zywitzki, Olaf
Zeitschriftenaufsatz
2019High-Rate Deposition of High-Pure Silicon Thin Films for PV-Absorber Layers by Crucible-free Electron Beam Physical Vapor Deposition
Saager, Stefan; Scheffel, Bert; Heinß, Jens-Peter
Zeitschriftenaufsatz
2019High-rate deposition of high-pure silicon thin films for PV-Absorber layers by crucible-free electron beam physical vapor deposition
Saager, Stefan; Scheffel, Bert; Heinß, Jens-Peter
Zeitschriftenaufsatz
2019Porous silicon thin films as anodes for lithium ion batteries deposited by co-evaporation of silicon and zinc
Saager, Stefan; Scheffel, Bert; Zywitzki, Olaf; Modes, Thomas; Piwko, Markus; Dörfler, Susanne; Althues, Holger; Metzner, Christoph
Zeitschriftenaufsatz
2019Synthesis of Porous Thin Films as Silicon Anodes for Lithium-Ion Batteries
Saager, Stefan; Scheffel, Bert; Zywitzki, Olaf; Modes, Thomas; Piwko, Markus; Doerfler, Susanne; Althues, Holger; Metzner, Christoph
Zeitschriftenaufsatz
2018Homogeneous deposition of high purity silicon thin films with highest rates above 30 µm/min
Saager, Stefan; Scheffel, Bert
Konferenzbeitrag
2018Lithium-Ionen-Batterien - Potenzial von Vakuumdünnschichtprozessen in der Herstellung
Luber, Claus; Scheffel, Bert; Saager, Stefan; Straach, Steffen; Schiller, Nicolas
Zeitschriftenaufsatz
2018Porous silicon thin films as anodes for lithium ion batteries deposited by co-evaporation of silicon and zinc
Saager, Stefan; Scheffel, Bert; Zywitzki, Olaf; Modes, Thomas; Piwko, Markus; Doerfler, Susanne; Althues, Holger; Metzner, Christoph
Zeitschriftenaufsatz
2017Plasma-assisted reactive high-rate vapor deposition of yttria-stabilized zirconia using electron beam evaporation and spotless vacuum arc
Scheffel, Bert; Zywitzki, Olaf; Metzner, Christoph
Zeitschriftenaufsatz
2016New vacuum coating technologies for metal strips and foils
Metzner, Christoph; Heinß, Jens-Peter; Scheffel, Bert; Morgner, Henry
Konferenzbeitrag
2016Reactive high-rate deposition of titanium oxide coatings using electron beam evaporation, spotless arc and dual crucible
Scheffel, Bert; Modes, Thomas; Metzner, Christoph
Zeitschriftenaufsatz
2016Vorrichtung zum Bedampfen eines Substrates innerhalb einer Vakuumammer
Scheffel, Bert; Metzner, Christoph; Morgner, Henry; Händel, Frank; Finkenwirth, Bernd
Patent
2014Spotless arc activated high‐rate deposition using dual crucible technology for titanium dioxide coatings
Scheffel, Bert; Modes, Thomas; Metzner, Christoph
Konferenzbeitrag