Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2012Conformal Al2O3 coatings on black silicon by thermal ALD for surface passivation
Otto, M.; Kroll, M.; Käsebier, T.; Salzer, R.; Wehrspohn, R.B.
Konferenzbeitrag, Zeitschriftenaufsatz
2012Extremely low surface recombination velocities in black silicon passivated by atomic layer deposition
Otto, M.; Kroll, M.; Käsebier, T.; Salzer, R.; Tünnermann, A.; Wehrspohn, R.B.
Zeitschriftenaufsatz
2012Passivation of optically black silicon wafers by atomic layer deposited Al2O3 films
Otto, M.; Kroll, M.; Käsebier, T.; Salzer, R.; Ziegler, J.; Sprafke, A.; Wehrspohn, R.B.
Konferenzbeitrag
2011Surface passivation of black silicon by thermal ALD deposited aluminum oxide
Otto, M.; Kroll, M.; Käsebier, T.; Ernst, M.; Salzer, R.; Wehrspohn, R.B.
Konferenzbeitrag
2011Transparent conductive oxide photonic crystals on textured substrates
Upping, J.; Salzer, R.; Otto, M.; Beckers, T.; Steidl, L.; Zentel, R.; Carius, R.; Wehrspohn, R.B.
Zeitschriftenaufsatz
2010Characterization and failure analysis of 3D integrated semiconductor devices-novel tools for fault isolation, target preparation and high resolution material analysis
Altmann, F.; Petzold, M.; Schmidt, C.; Salzer, R.; Cassidy, C.; Tesch, P.; Smith, N.
Konferenzbeitrag
2010Conformal transparent conducting oxides on black silicon
Otto, M.; Kroll, M.; Käsebier, T.; Lee, S.-M.; Putkonen, M.; Salzer, R.; Miclea, P.T.; Wehrspohn, R.B.
Zeitschriftenaufsatz
2010Micro structure analysis for system in package components - novel tools for fault isolation, target preparation, and high-resolution material diagnostics
Petzold, M.; Altmann, F.; Krause, M.; Salzer, R.; Schmidt, C.; Martens, S.; Mack, W.; Dömer, H.; Nowodzinski, A.
Konferenzbeitrag
2010Photonic crystal devices with multiple dyes by consecutive local Infiltration of single pores
Nolte, P.W.; Pergande, D.; Schweizer, S.L.; Geuss, M.; Salzer, R.; Makowski, B.T.; Steinhart, M.; Mack, P.; Hermann, D.; Busch, K.; Weder, C.; Wehrspohn, R.B.
Zeitschriftenaufsatz
2010Quantitative assessment of TEM-sample warping caused by FIB preparation
Salzer, R.; Graff, A.; Simon, M.; Altmann, F.
Abstract
2009Infiltration of individual pores in macroporous silicon photonic crystals
Nolte, P.W.; Pergande, D.; Schweizer, S.L.; Geuss, M.; Salzer, R.; Makowski, B.; Steinhart, M.; Wehrspohn, R.B.; Weder, C.
Konferenzbeitrag
2009Standard free thickness determination of thin TEM samples via backscatter electron image correlation
Salzer, R.; Graff, A.; Simon, M.; Altmann, F.
Konferenzbeitrag
2009Standard free thickness determination of thin TEM samples via backscatter electron image correlation
Salzer, R.; Graff, A.; Simon, M.; Altmann, F.
Konferenzbeitrag, Zeitschriftenaufsatz
2009Surface amorphization, sputter rate, and intrinsic stresses of silicon during low energy Ga+ focused-ion beam milling
Pastewka, L.; Salzer, R.; Graff, A.; Altmann, F.; Moseler, M.
Konferenzbeitrag, Zeitschriftenaufsatz
2008Local infiltration of individual pores with dyes in 2D macroporous silicon photonic crystals
Nolte, P.; Pergande, D.; Schweizer, S.L.; Wehrspohn, R.B.; Geussy, M.; Steinhart, M.; Salzer, R.
Konferenzbeitrag
2008Reducing of ion beam induced surface damaging using »low voltage«
Salzer, R.; Simon, M.; Graff, A.; Altmann, F.; Pastewka, L.; Moseler, M.
Konferenzbeitrag