Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2021Device Design and Process Integration of SiC Trench MOSFETs
Lim, Minwho; Rusch, Oleg; Erlbacher, Tobias; Bauer, Anton
Vortrag
2021Frabrication and Evaluation of 4H-SiC Double Trench MOSFETs on 6-inch Wafer
Lim, Minwho; Kim, Seongjun; Rusch, Oleg; Kang, Min-Jae; Sung, Mi-Je; Kwak, Juyoung; Lee, Nam-Suk; Shin, Hoon-Kyu; Erlbacher, Tobias; Bauer, Anton
Vortrag
2020Low-Resistance Ohmic Contact Formation by Laser Annealing of N-Implanted 4H-SiC
Hellinger, Carsten; Rusch, Oleg; Rommel, Mathias; Bauer, Anton J.; Erlbacher, Tobias
Konferenzbeitrag
2020Reducing On-Resistance for SiC Diodes by Thin Wafer and Laser Anneal Technology
Rusch, Oleg; Hellinger, Carsten; Moult, Jonathan; Corcoran, Yunji; Erlbacher, Tobias
Konferenzbeitrag
2019Influence of Trench Design on the Electrical Properties of 650V 4H-SiC JBS Diodes
Rusch, Oleg; Moult, Jonathan; Erlbacher, Tobias
Konferenzbeitrag
2019Low-resistance ohmic contact formation by laser annealing of N-implanted 4H-SiC
Hellinger, Carsten; Rusch, Oleg; Rommel, Mathias; Bauer, Anton J.; Erlbacher, Tobias
Poster