Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2019Electrocaloric temperature change in ferroelectric Si-doped hafnium oxide (HfO2) thin films
Mart, C.; Kämpfe, T.; Pätzold, B.; Rudolph, M.; Czernohorsky, M.; Müller, J.; Weinreich, W.
Vortrag
2019Enabling Users to Specify Correct Privacy Requirements
Rudolph, Manuel; Polst, Svenja; Dörr, Jörg
Konferenzbeitrag
2019Hard- und Softwarerealisierung eines Optical Projection Tomography (OPT)-Systems
Weiß, Vitalis
: Rudolph, Mathias (Betreuer Hochschule); Braumann, Ulf-Dietrich (Betreuer)
Master Thesis
2019Principles and Challenges for Binary Oxide Based Ferroelectric Memory FeFET
Ali, T.; Polakowski, P.; Büttner, T.; Kämpfe, T.; Rudolph, M.; Pätzold, B.; Hoffmann, R.; Czernohorsky, M.; Kühnel, K.; Steinke, P.; Eng, L.M.; Seidel, K.
Konferenzbeitrag
2019Principles and Challenges for Binary Oxide Based Ferroelectric Memory FeFET
Ali, T.; Polakowski, P.; Büttner, T.; Kämpfe, T.; Rudolph, M.; Pätzold, B.; Hoffmann, R.; Czernohorsky, M.; Kühnel, K.; Steinke, P.; Eng, L.M.; Seidel, K.
Poster
2019Theory and Experiment of Antiferroelectric (AFE) Si-Doped Hafnium Oxide (HSO) Enhanced Floating-Gate Memory
Ali, T.; Polakowski, P.; Büttner, T.; Kämpfe, T.; Rudolph, M.; Pätzold, B.; Hoffmann, R.; Czernohorsky, M.; Kühnel, K.; Steinke, P.; Zimmermann, K.; Biedermann, K.; Eng, L.M.; Seidel, K.; Müller, J.
Zeitschriftenaufsatz
2018Aspects of high aspect ratio silicon etching - capacitor application
Rudolph, Matthias; Pätzold, Björn; Czernohorsky, Malte
Vortrag
2018High Endurance Ferroelectric Hafnium Oxide-Based FeFET Memory Without Retention Penalty
Ali, T.; Polakowski, P.; Riedel, S.; Büttner, T.; Kämpfe, T.; Rudolph, M.; Pätzold, B.; Seidel, K.; Löhr, D.; Hoffmann, R.; Czernohorsky, M.; Kühnel, K.; Steinke, P.; Calvo, J.; Zimmermann, K.; Müller, J.
Zeitschriftenaufsatz
2018Satisfying and Efficient Privacy Settings
Rudolph, Manuel; Polst, Svenja
Konferenzbeitrag
2018Silicon doped hafnium oxide (HSO) and hafnium zirconium oxide (HZO) based FeFET
Ali, T.; Polakowski, P.; Riedel, S.; Büttner, T.; Kämpfe, T.; Rudolph, M.; Pätzold, B.; Seidel, K.; Löhr, D.; Hoffmann, R.; Czernohorsky, M.; Kühnel, K.; Thrun, X.; Hanisch, N.; Steinke, P.; Calvo, J.; Müller, J.
Zeitschriftenaufsatz
2018System zur Steuerung mindestens eines Betriebsmittels zur Herstellung und/oder Montage von Werkstücken
Rudolph, Marco
Patent
2018Verfahren und ein System zur Steuerung mehrerer Betriebsmittel, die für die gesteuerte Fertigung und/oder Montage von Bauteilen oder Komponenten
Bdiwi, Mohamad; Krusche, Sebastian; Pfeifer, Marko; Rashid, Aquib; Rudolph, Marco
Patent
2018Why Users Ignore Privacy Policies
Rudolph, Manuel; Feth, Denis; Polst, Svenja
Konferenzbeitrag
2016Catalytic ALD of SiO2 as spacer for an E-Beam direct write self-aligned double patterning process on 300 mm wafers
Kühnel, Kati; Riedel, Stefan; Weinreich, Wenke; Thrun, Xaver; Czernohorsky, Malte; Pätzold, Björn; Rudolph, Matthias
Vortrag
2016Evaluation of water based intelligent fluids for resist stripping in single wafer cleaning tools
Rudolph, Matthias; Esche, Silvio; Hohle, Christoph; Schumann, Dirk; Steinke, Philipp; Thrun, Xaver; Sonntag, Justus von
Konferenzbeitrag
2016A framework for generating user- and domain-tailored security policy editors
Rudolph, Manuel; Moucha, Cornelius; Feth, Denis
Bericht
2016A framework for generating user- and domain-tailored security policy editors
Rudolph, Manuel; Moucha, Cornelius; Feth, Denis
Konferenzbeitrag
2016Grundlagenentwicklung für ein modellbasiertes Steuerungssystem
Förster, Markus
: Rudolph, Marco
Bachelor Thesis
2016Patterning and Imaging with Electrons: Assessing Multi-Beam SEM for e-Beam Structured CMOS Samples
Garbowski, Tomasz; Panteleit, Friedhelm; Dellemann, Gregor; Gutsch, Manuela; Hohle, Christoph; Reich, Elke; Rudolph, Matthias; Steidel, Katja; Thrun, Xaver; Zeidler, Dirk
Konferenzbeitrag
2016Reaktives Ionenätzen zur Mehrfachstrukturierung und Elektrodentrennung für Kondensatoranwendungen in der Halbleiterindustrie
Pätzold, Björn
: Hohle, Christoph; Rudolph, Matthias; Rennekamp, Reinhold
Master Thesis
2016Requirements elicitation and derivation of security policy templates - an industrial case study
Rudolph, Manuel; Feth, Denis; Doerr, Joerg; Spilker, Joerg
Bericht
2016Requirements elicitation and derivation of security policy templates - an industrial case study
Rudolph, Manuel; Feth, Denis; Doerr, Joerg; Spilker, Joerg
Konferenzbeitrag
2016Usable security policy specification
Rudolph, Manuel; Feth, Denis
Bericht
2016Usable security policy specification
Rudolph, Manuel; Feth, Denis
Konferenzbeitrag
2015Dealing with uncertainty in context-aware mobile applications
Jung, Christian; Eitel, Andreas; Feth, Denis; Rudolph, Manuel
Konferenzbeitrag
2015Local pre-curing of an adhesive for the fabrication of shaped piezo-metal-compounds
Drossel, Welf-Guntram; Müller, Roland; Ihlemann, J.; Rudolph, M.; Hensel, Sebastian; Nestler, Matthias
Konferenzbeitrag
2015Nano patterning at Fraunhofer IPMS-CNT: Fabrication of silicon master for NIL via e-beam direct write
Thrun, Xaver; Choi, Kang-Hoon; Gutsch, Manuela; Hohle, Christoph; Rudolph, Matthias; Seidel, Konrad
Poster
2014Effect of solvent exchange on the stability of sterically functionalized magnetite nanoparticles in poly(methyl methacrylate) solutions and resulting spray dried composites
Bremerstein, Tina; Rudolph, Martin; Peuker, Urs Alexander
Zeitschriftenaufsatz
2014Electrical signatures of hypervelocity impact plasma with applications in in-situ particle detection
Rudolph, Martin; Schimmerohn, Martin; Osterholz, Jens; Schäfer, Frank
Zeitschriftenaufsatz, Konferenzbeitrag
2014Innovative and water based stripping approach for thick and bulk photoresists
Rudolph, M.; Schumann, D.; Thrun, X.; Esche, S.; Hohle, C.
Konferenzbeitrag
2014Introduction of an innovative water based photoresist stripping process using intelligent fluids
Rudolph, Matthias; Felten, Peter; Thrun, Xaver; Schumann, Dirk; Esche, Silvio; Hohle, Christoph
Konferenzbeitrag
2014Satellite vulnerability to space debris - an improved 3D risk assessment methodology
Grassi, Lilith; Tiboldo, Francesca; Destefanis, Roberto; Donath, Thérèse; Winterboer, Arne; Evans, Leanne; Janovsky, Rolf; Kempf, Scott; Rudolph, Martin; Schäfer, Frank; Gelhaus, Johannes
Zeitschriftenaufsatz
2014Security policy specification templates for critical infrastructure services in the cloud
Rudolph, Manuel; Schwarz, Reinhard; Jung, Christian
Bericht
2014Security policy specification templates for critical infrastructure services in the cloud
Rudolph, Manuel; Schwarz, Reinhard; Jung, Christian
Konferenzbeitrag
2014User-friendly and tailored policy administration points
Rudolph, Manuel
Bericht
201315 days electron beam exposure for manufacturing of large area silicon based NIL master
Thrun, X.; Choi, K.-H.; Freitag, M.; Gutsch, M.; Hohle, C.; Paul, J.; Rudolph, M.; Steidel, K.
Zeitschriftenaufsatz
2013Computational methodology to predict satellite system-level effects from impacts of untrackable space debris
Welty, N.; Rudolph, M.; Schäfer, F.; Apeldoorn, J.; Janovsky, R.
Zeitschriftenaufsatz
2013Evaluation of an advanced dual hard mask stack for high resolution pattern transfer
Paul, Jan; Rudolph, M.; Riedel, S.; Thrun, X.; Wege, S.; Hohle, C.
Konferenzbeitrag
2013Experiments and FE-simulation of the forming and curing process of bonded piezo-metal-structures
Neugebauer, Reimund; Ihlemann, Jörg; Lachmann, Lutz; Drossel, Welf-Guntram; Hensel, Sebastian; Nestler, Matthias; Rudolph, M.
Konferenzbeitrag
2013High resolution patterning for sub 30 nm technology nodes using a ceramic based dual hard mask
Paul, J.; Rudolph, M.; Riedel, S.; Thrun, X.; Beyer, V.; Wege, S.; Hohle, C.
Konferenzbeitrag
2013High-density capacitors for SiP and SoC applications based on three-dimensional integrated metal-isolator-metal structures
Weinreich, Wenke; Rudolph, Matthias; Koch, Johannes; Paul, Jan; Seidel, Konrad; Riedel, Stefan; Sundqvist, Jonas
Konferenzbeitrag
2013Review of radio frequency emission from hypervelocity impact plasmas
Rudolph, Martin
Konferenzbeitrag, Zeitschriftenaufsatz
2013Review of Radio Frequency Emission from Hypervelocity Impact Plasmas
Rudolph, M.
Konferenzbeitrag, Zeitschriftenaufsatz
2013Scaling and optimization of high-density integrated Si-capacitors
Weinreich, W.; Seidel, K.; Rudolph, M.; Koch, J.; Paul, J.; Riedel, S.; Sundqvist, J.; Steidel, K.; Gutsch, M.; Beyer, V.; Hohle, C.
Konferenzbeitrag
2012Computational methodology to predict satellite system-level effects from impacts of untrackable space debris
Welty, N.; Rudolph, M.; Schäfer, F.; Apeldoorn, J.; Janovsky, R.
Konferenzbeitrag
2012A critical survey of security indicator approaches
Rudolph, Manuel; Schwarz, Reinhard
Konferenzbeitrag
2012A critical survey of security indicator approaches
Rudolph, Manuel; Schwarz, Reinhard
Bericht
2012Debris Shielding for Inflatable Structures Development and Characterization at Hypervelocity Impacts
Destefanis, R.; Faraud, M.; Rudolph, M.; Weber, K.E.; Lambert, M.; Schäfer, F.
Konferenzbeitrag
2012Extending the Applicable Range of the SRL Ballistic Limit Equation to Oblique Hypervelocity Impacts
Rudolph, M.; Welty, N.; Putzar, R.; Schäfer, F.; Koebel, D.; Scheper, M.; Janovsky, R.; Apeldoorn, J.; Lambert, M.
Konferenzbeitrag
2012Feasibility study of optical/e-beam complementary lithography
Hohle, Christoph; Choi, Kang-Hoon; Freitag, Martin; Gutsch, Manuela; Rudolph, Matthias; Thrun, Xaver; Jaschinsky, Philipp; Kahlenberg, Frank; Klein, Christof; Klikovits, Jan
Konferenzbeitrag
2012Fragmentation of hypervelocity aluminum projectiles on fabrics
Rudolph, M.; Schafer, F.; Destefanis, R.; Faraud, M.; Lambert, M.
Zeitschriftenaufsatz
2012Introduction of zirconium oxide in a hardmask concept for highly selective patterning of scaled high aspect ratio trenches in silicon
Paul, Jan; Riedel, Stefan; Rudolph, Matthias; Wege, Stephan; Czernohorsky, Malte; Sundqvist, Jonas; Hohle, Christoph; Beyer, Volkhard
Zeitschriftenaufsatz, Konferenzbeitrag
2012Prototype ATLAS IBL modules using the FE-I4A front-end readout chip
Albert, J.; Alex, M.; Alimonti, G.; Allport, P.; Altenheiner, S.; Ancu, S.; Andreazza, A.; Arguin, J.; Arutinov, D.; Backhaus, M.; Bagolini, A.; Ballansat, J.; Barbero, M.; Barbier, G.; Bates, R.; Battistin, M.; Baudin, P.; Beau, T.; Beccherle, R.; Beck, H.; Benoit, M.; Bensinger, J.; Bomben, M.; Borri, M.; Boscardin, M.; Direito, J.B.; Bousson, N.; Boyd, R.G.; Breugnon, P.; Bruni, G.; Bruschi, M.; Buchholz, P.; Buttar, C.; Cadoux, F.; Calderini, G.; Caminada, L.; Capeans, M.; Casse, G.; Catinaccio, A.; Cavalli-Sforza, M.; Chauveau, J.; Chu, M.; Ciapetti, M.; Cindro, V.; Citterio, M.; Clark, A.; Cobal, M.; Coelli, S.; Colijn, A.; Colin, D.; Collot, J.; Crespo-Lopez, O.; Dalla Betta, G.; Darbo, G.; DaVia, C.; David, P.; Debieux, S.; Delebecque, P.; Devetak, E.; DeWilde, B.; Di Girolamo, B.; Dinu, N.; Dittus, F.; Diyakov, D.; Djama, F.; Dobos, D.; Doonan, K.; Dopke, J.; Dorholt, O.; Dube, S.; Dushkin, A.; Dzahini, D.; Egorov, K.; Ehrmann, O.; Elldge, D.; Elles, S.; Elsing, M.; Eraud, L.; Ereditato, A.
Zeitschriftenaufsatz
2012Security Indicators - a State of the Art Survey Public Report
Rudolph, Manuel; Schwarz, Reinhard
Bericht
2012Terminal Ballistics of Flexible Micrometeoroid and Space Debris Protection Shields
Rudolph, M.; Weber, K.E.; Schäfer, F.; Destefanis, R.; Faraud, M.; Lambert, M.
Konferenzbeitrag
2011Electrical response of current-carrying space-grade harnesses to hypervelocity impact
Rudolph, M.; Welty, N.; Maier, C.; Putzar, R.; Schäfer, F.; Lambert, M.
Konferenzbeitrag
2011Fragmentation of hypervelocity aluminum projectiles on fabrics
Rudolph, M.; Schäfer, F.; Destefanis, R.; Faraud, M.; Lambert, M.
Konferenzbeitrag
2011Light-gas gun launcher concept for high-g proof miniature suborbital payloads
Schäfer, F.; Schimmerohn, M.; Rudolph, M.; Herbrich, S.
Konferenzbeitrag
2011Security evaluation of service-oriented systems using the SiSOA method
Jung, Christian; Rudolph, Manuel; Schwarz, Reinhard
Bericht
2011Security evaluation of service-oriented systems with an extensible knowledge base
Jung, Christian; Rudolph, Manuel; Schwarz, Reinhard
Konferenzbeitrag
2011Security evaluation of service-oriented systems with an extensible knowledge base
Jung, Christian; Rudolph, Manuel; Schwarz, Reinhard
Bericht
2010Fragmentation of aluminum projectiles on fabrics
Rudolph, M.; Schäfer, F.; Destefanis, R.; Faraud, M.; Lambert, M.
Konferenzbeitrag
2010Green fluorescent nanodiamond conjugates and their possible applications for biosensing
Opitz, J.; Sorge, M.; Rose, N.; Rudolph, M.; Krueger, P.; Hannstein, I.; Schreiber, J.; Mkandawire, M.; Pompe, W.; Roedel, G.; Lapina, V.A.; Appelhans, D.
Konferenzbeitrag
2010Indicator-based architecture-level security evaluation in a service-oriented environment
Antonino, Pablo; Duszynski, Slawomir; Jung, Christian; Rudolph, Manuel
Bericht
2010Indicator-based architecture-level security evaluation in a service-oriented environment
Antonino, Pablo; Duszynski, Slawomir; Jung, Christian; Rudolph, Manuel
Konferenzbeitrag
2000Best before... Unkonventionelle Haltbarmachungsverfahren unter der Lupe
Pfeiffer, T.; Rudolph, M.; Knorr, D.
Zeitschriftenaufsatz