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Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2011Qualitätsmanagement
Petzold, H.-C.; Beckhaus, C.
Aufsatz in Buch
1991Ion-induced deposition for x-ray mask repair. Rate optimization using a time-dependent model
Heard, P.J.; Petzold, H.-C.
Konferenzbeitrag
1990Microstructuring of gold on X-ray masks with focused Ga+ ion beams
Müller, K.P.; Petzold, H.-C.
Konferenzbeitrag
1989Determination of soft x-ray emission of pulsed plasma sources by comparison with the calculable emission of an electron storage ring using x-ray lithographic exposures
Kühne, M.; Petzold, H.-C.
Zeitschriftenaufsatz
1989Laser induced photolytic tin deposition with high deposition rates for the repair of clear X-ray mask defects
Putzar, R.; Petzold, H.-C.; Schaffer, H.; Weigmann, U.
Konferenzbeitrag
1989Repair of clear defects on X-ray masks by ion-induced metal deposition
Petzold, H.-C.; Burghause, H.; Putzar, R.; Weigmann, U.; Economou, N.P.; Stern, L.A.
Konferenzbeitrag
1988Laser-induced metal deposition for clear defect repair work on X-ray masks
Putzar, R.; Petzold, H.-C.; Weigmann, U.
Konferenzbeitrag
1988Soft x-ray radiation from laser-produced plasmas - characterization of radiation emission and its use in x-ray lithography
Kühne, M.; Petzold, H.-C.
Zeitschriftenaufsatz
1987Laser-induced metal deposition on silicon membranes for X-ray lithography
Petzold, H.-C.; Putzar, R.; Weigmann, U.; Wilke, I.
Konferenzbeitrag
1987Repair of clear X-ray mask defects by laser-induced metal deposition
Petzold, H.-C.; Putzar, R.; Weigmann, U.; Wilke, I.
Zeitschriftenaufsatz
1987Reparatur klarer Defekte auf Roentgenmasken durch laserpyrolytische Materialabscheidung
Petzold, H.-C.; Weigmann, U.
Abstract
1985Conversion efficiency of laser radiation into soft x-ray radiation of laser produced plasmas for x-ray lithography
Petzold, H.-C.; Kuehne, M.
Zeitschriftenaufsatz
1984Soft-x-ray generation in a helium environment using laser-produced plasmas
Petzold, H.-C.; Kuehne, M.
Zeitschriftenaufsatz